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Figure 6
An HR-TEM micrograph showing alternating coherent c-Al(Ti)N and c-Ti(Al)N nanolamellae in film C. An inset with a fast Fourier transformation indicates the presence of only the cubic phase within the probed volume. |
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Figure 6
An HR-TEM micrograph showing alternating coherent c-Al(Ti)N and c-Ti(Al)N nanolamellae in film C. An inset with a fast Fourier transformation indicates the presence of only the cubic phase within the probed volume. |