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Figure 1
Data of the various specular and fluorescence measurements from the Cr/Sc multilayer sample. (a) EUV reflectance at an angle of incidence of [\alpha_{\rm i}] = 88.5° from the surface. (b) XRR measured with Cu Kα radiation. (c) REUV reflectance across the Sc L edge. Several angular reflectance scans were performed at selected wavelengths across the Sc L edge. (d) and (e) XSW fluorescence recorded across the first Bragg peak by varying the angle of incidence for the Sc signal (d) and the Cr signal (e). Both curves were recorded simultaneously at an excitation energy of E = 6.25 keV.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 49| Part 6| December 2016| Pages 2161-2171
https://doi.org/10.1107/S1600576716015776
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