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Figure 2
(a) Fitted experimental EUV reflectance curves across the wavelength of the radiation impinging at 1.5° from normal, based on the binary model. The green curve shows the maximum possible reflectance in the water window assuming a perfect multilayer system without roughness or interdiffusion. (b) The optimal model based on the analysis of the EUV reflectance (cf. Fig. 2[link]a) shows a clear mismatch with the measured XRR curve in the second Bragg peak.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 49| Part 6| December 2016| Pages 2161-2171
https://doi.org/10.1107/S1600576716015776
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