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Figure 7
(a), (b), (c) TEM and (d), (e), (f) inverted tomography TEM images: (a), (d) as-implanted, (b), (e) 853 K and (c), (f) 1073 K. The oxide layer is not shown in the tomography images. Large-size helium-filled bubbles are located in the amorphous Si layer. `Small' bubbles are located inside the distorted crystalline Si layer.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 50| Part 2| April 2017| Pages 539-546
https://doi.org/10.1107/S1600576717003259
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