X-ray topography of subsurface crystal layers

Swiatek, Z.; Fodchuk, I.; Zaplitnyy, R.

doi:10.1107/S1600576717007208

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 4
CdTe(111). Region I contains implanted As ions (E = 100 keV, D = 10¹⁵ cm^–2). Topograms were obtained with Cu $[{K{\alpha _{1,2}}}]$ radiation. (a) Asymmetric 440 reflection, L_ext = 3.68 µm; (b) skew-asymmetric 511 reflection, L_ext = 2.95 µm (φ = 30°); (c) skew-asymmetric 511 reflection, L_ext = 1.65 µm (φ = 20°). Numbers 1 indicates structure fragmentation, 2 cavities, 3 micro-scratches and 4 hill-like inclusions.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 50| Part 3| June 2017| Pages 727-733

https://doi.org/10.1107/S1600576717007208

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