Incorporation of interfacial roughness into recursion matrix formalism of dynamical X-ray diffraction in multilayers and superlattices

Lobach, I.; Benediktovitch, A.; Ulyanenkov, A.

doi:10.1107/S1600576717004137

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 5
Calculated symmetric scans of a superlattice [GaAs(2.82271 nm)/Al_0.1Ga_0.9As(2.82675 nm)]₁₀₀ on a GaAs substrate. Reflection 004, interfacial roughness 0.2 nm, σ polarization. [|D|]

is the magnitude of the amplitude of the diffracted wave and $[\omega_{\rm in}]$ is the incidence angle (with respect to the surface plane). Type c of transition layer model is assumed. Each interface has roughness. The dark-blue scan takes into account roughness, and the light-green one does not. Black and gray dashed lines represent scans of one period of the superlattice with and without interfacial roughness, respectively.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 50| Part 3| June 2017| Pages 681-688

https://doi.org/10.1107/S1600576717004137

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