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Figure 6
A thin layer (5 nm) of Si0.4Ge0.6 on an Si substrate. Reflection 004. Symmetric scan. The blue line represents the calculation for the nominal model of the structure with sharp interfaces. The black line depicts the fit by the model with interfacial roughness. In the fit, the thickness is 5.8 nm and the roughness is 0.6 nm.

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CRYSTALLOGRAPHY
ISSN: 1600-5767
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