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Figure 3
A series of QxQz RSMs projected along the Qy direction, as measured for various beam positions on an SiGe LG2 crystal. Beam positions at the bottom, the middle and the top of the graded part are shown for the symmetric 004 reflection [panels (a), (b) and (c)] and for the asymmetric 115 reflection [panels (e), (f) and (g)]. For comparison, typical laboratory RSMs recorded with a large beam diameter averaging some thousands of crystals are shown for (d) the symmetric 004 reflection and (h) the asymmetric 115 reflection. The inset in the bottom right-hand corner of each RSM shows the irradiated area in the microcrystal.

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ISSN: 1600-5767
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