journal menu
![[Figure 5]](rg5143fig5mag.jpg)
|
|
Figure 5
A series of three-dimensional 004 RSMs with QxQz, QyQz and QyQx projections, recorded with beam positions at the top [panels (a), (d) and (g)] and bottom [panels (b), (e) and (h)] of the microcrystals. The 004 RSMs of the unpatterned reference for two different random positions are reported in panels (j) and (k). Crystals LG2 [panels (a) and (b)], LG5 [panels (d) and (e)] and HG2 [panels (g) and (h)] are shown. Series of position-sensitive maps of the scattered intensity around the SiGe 004 reflection from the compositionally graded part are displayed in panels (c), (f) and (i). Because these maps are acquired by physically moving the crystal in the xy plane while recording the intensity at every position at nearly constant incidence angle ω (the intensity was summed for ω values corresponding to XGe ![[\gt]](teximages/rg5143fi74.gif) 0.1), the x-axis range of the intensity maps corresponds to a scaled crystal height z, while the y-axis range is unscaled. The maps can therefore be viewed as projections of the crystal shape along the direction of the incident X-ray beam into the xy plane. For perfectly vertical prismatic crystals, the maps would have a rectangular shape with the long side of the rectangle along the x axis having a length of z/tanω. In reality, the rectangles are additionally distorted because of the finite crystal tilt. The white dots indicate the X-ray beam positions corresponding to the three-dimensional maps displayed in the upper panels. Panel (l) is the same as (c), (f) and (i) but for the unpatterned reference. Here, no significant spatial intensity distribution is observed. |
![[Figure 5]](rg5143fig5.jpg)
 | JOURNAL OF APPLIED CRYSTALLOGRAPHY |
ISSN: 1600-5767
