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Figure 6
X-ray diffraction signals during (a) non-reactive and (b) reactive deposition, plotted as a function of film thickness. The nominal peak positions of the crystalline phases identified after growth are indicated by black dashed lines. The dashed white lines (vertical) indicate the film thickness with minimum roughness.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 51| Part 4| August 2018| Pages 1013-1020
https://doi.org/10.1107/S1600576718007367
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