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Figure 7
Comparison of X-ray topographs from a (001)-oriented wafer acquired with (a) and (b) 606 reflections. The scale bars correspond to 0.1 mm. The arrows indicate the direction of X-ray incidence. |
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Figure 7
Comparison of X-ray topographs from a (001)-oriented wafer acquired with (a) and (b) 606 reflections. The scale bars correspond to 0.1 mm. The arrows indicate the direction of X-ray incidence. |
access