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Figure 2
The preparation steps of ZnO nanospike cross-sections using the geometric shadow-FIB technique. (a) (Left) As-grown ZnO nanospikes from a Zn spherical particle. (Right) Amorphous carbon was deposited via electron-beam-induced decomposition to embed the spikes in a matrix material. (b) The first step of FIB trench milling and the lift-out process. (c) The rotated (180°) specimen was milled with a Ga ion beam using the silicon substrate as protection against severe damage to the carbon matrix. (d) An ion-milled lamella with electron-beam-transparent cross-section specimens (red circles).

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 52| Part 5| October 2019| Pages 1009-1015
https://doi.org/10.1107/S1600576719009415
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