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Figure 1
Schematic of the neural network architecture used in this work. The input layer consists of 52 reflectivity values at discrete qz positions. The output layer consists of four sample parameters: three film parameters (thickness, roughness and SLD) and one substrate parameter (thickness of the native silicon oxide). All layers are fully connected with the next by weights that are randomly initialized and then optimized.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
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