Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊044) and tilt of suspended monolithic silicon nanowire structures

Dolabella, S.; Frison, R.; Chahine, G.A.; Richter, C.; Schulli, T.U.; Tasdemir, Z.; Alaca, B.E.; Leblebici, Y.; Dommann, A.; Neels, A.

doi:10.1107/S1600576719015504

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 5
Two-dimensional real-space maps obtained by integrating the diffracted intensity over the regions (a) ROI 1, (b) ROI 2 and (c) ROI 3 in the 3D-RSM.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 53| Part 1| February 2020| Pages 58-68

https://doi.org/10.1107/S1600576719015504

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