Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊044) and tilt of suspended monolithic silicon nanowire structures

Dolabella, S.; Frison, R.; Chahine, G.A.; Richter, C.; Schulli, T.U.; Tasdemir, Z.; Alaca, B.E.; Leblebici, Y.; Dommann, A.; Neels, A.

doi:10.1107/S1600576719015504

Journal of Applied Crystallography Journal of Applied
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Figure 7
NW analysis. (a) A SEM image, with the white point indicating the scanned point taken near the centre of the NW. (b) A Q_x–Q_y projection with a 1D profile, obtained from (c) the 3D-RSM around the Si 044 reciprocal-lattice points.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 53| Part 1| February 2020| Pages 58-68

https://doi.org/10.1107/S1600576719015504

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