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Figure 8
The edge of the pillars. (a) A SEM image, with the white dot indicating one of the measured points. (b) A 2D-RSM with 1D sections Qx and Qz obtained from (c) the 3D-RSM. The 2D-RSM is plotted as an isosurface. The measured 1D patterns (dots) are fitted (red curve) with the Gaussian function y = y0 + [A/w(π/2)1/2] exp{−2[(x − xc)/w]2}. Further details are provided in the supporting information.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 53| Part 1| February 2020| Pages 58-68
https://doi.org/10.1107/S1600576719015504
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