Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊044) and tilt of suspended monolithic silicon nanowire structures

Dolabella, S.; Frison, R.; Chahine, G.A.; Richter, C.; Schulli, T.U.; Tasdemir, Z.; Alaca, B.E.; Leblebici, Y.; Dommann, A.; Neels, A.

doi:10.1107/S1600576719015504

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 9
Real-space distribution maps of in-plane strain (∊₀₄₄) as a function of the beam position on the sample. (a) A strain plot generated from the reference 044 silicon main peak within ROI 1. (b) A strain plot obtained from the Q(x, y, z) values of the peak within ROI 3 and (c) a strain plot from the peak inside ROI 2.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 53| Part 1| February 2020| Pages 58-68

https://doi.org/10.1107/S1600576719015504

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