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Figure 9
Real-space distribution maps of in-plane strain (044) as a function of the beam position on the sample. (a) A strain plot generated from the reference 044 silicon main peak within ROI 1. (b) A strain plot obtained from the Q(x, y, z) values of the peak within ROI 3 and (c) a strain plot from the peak inside ROI 2.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
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