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Figure 2
Scheme demonstrating the two different stage positions, i.e. the orientations and rotations of the crystal with respect to the electron and ion beams used for cutting (a) trenches (1) and (2) and (b) trench (3). For a stage tilt of 52° (rotation of 0°) the large crystal surface is perpendicular to the ion beam, while a stage tilt of −10° followed by a rotation of 180° results in an angle of 62° between the edge surface and the ion beam.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 53| Part 3| June 2020| Pages 614-622
https://doi.org/10.1107/S1600576720003143
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