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Figure 1
The measurement geometry of the (001) Ge wafers, which were tilted around the [110] direction by 14° to obtain the 400 and [0\overline{4}0] stereo pair as well as the [2\overline{2}0] topograph on one film.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 53| Part 4| August 2020| Pages 880-884
https://doi.org/10.1107/S1600576720005993
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