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Figure 2
X-ray diffraction [(0{\overline 1}10)] rocking-curve mappings of wafer A3. (a) FWHM mapping (values of 25 arcsec and above are indicated by a dark-red color). (b) Δ2Θ mapping (values less than −20 arcsec are indicated by a dark-blue color, values higher than 20 arcsec are indicated by a dark-red color). Visible horizontal lines seem to be artifacts related to data-smoothing procedures to create the color contour maps.

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