Figure 2
X-ray diffraction rocking-curve mappings of wafer A3. (a) FWHM mapping (values of 25 arcsec and above are indicated by a dark-red color). (b) Δ2Θ mapping (values less than −20 arcsec are indicated by a dark-blue color, values higher than 20 arcsec are indicated by a dark-red color). Visible horizontal lines seem to be artifacts related to data-smoothing procedures to create the color contour maps. |