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Figure 5
XRT [{\bf g} = [{\overline 2}021]] measurements of the center region of wafers (a) A3 and (b) A4. The images shown are sections of the larger areas used for DD determination. The diagonal white lines are due to image stitching.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 53| Part 4| August 2020| Pages 1080-1086
https://doi.org/10.1107/S1600576720008961
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