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Figure 6
XRT measurements of a defect cluster of wafer A3: (a) [{\bf g} = [0004]], (b) [{\bf g} = [0{\overline 1}10]], (c) [{\bf g} = [{\overline 1}010]] and (d) [{\bf g} = [{\overline 1}100]]. BPSs with [{\bf l}] vectors of type [\langle {\overline 2}110 \rangle] are visible. They show high contrast if their [{\bf l}] vector is oblique towards [{\bf g}] ([{\bf l}_\angle] parallel to green arrows), and insignificant contrast if their [{\bf l}] vector is perpendicular to [{\bf g}] ([{\bf l}_\perp]) (parallel to red arrows).

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 53| Part 4| August 2020| Pages 1080-1086
https://doi.org/10.1107/S1600576720008961
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