Figure 2
(a) SEM image of the Siemens star test pattern; the scale bar is in (b). (b) Amplitude of the ptychographic reconstruction; the color bar represents transmission between 0 and 1. (c) Probe positions recovered via our position-correction algorithm; the scale bar is in (b). The area covered by the motor positions used for the ptychographic scan is indicated with rectangles in (a) and (c). (d) Position correction for each scanning point; null correction (0, 0) at the center. The main axis of this two-dimensional correction distribution is indicated, revealing a dominant vibration component along the x axis. |