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Figure 3
(a) SEM image of NW1 with the central X-ray beam position of measurements 1, 2 and 3 marked. (b) q(x,y) plane extracted from the 3D RSM at the GaAs 111 Bragg reflection recorded at position 1. The signal between the black lines is shown in the line plot on the right and exhibits thickness oscillations corresponding to a size of 120 ± 8 nm. (c) 2D projections of 3D RSMs measured at the three different positions along the growth axis of NW1. For each position the q(z,y), q(z,x) and q(x,y) projections are shown by filled contour plots with a logarithmic intensity scale.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 53| Part 5| October 2020| Pages 1310-1320
https://doi.org/10.1107/S1600576720011516
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