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Figure 3
Calculations for the radiation dose Df to the feature, using the required number of incident photons per pixel [\bar{n}_{\rm pixel}] for δr = 20 nm spatial resolution imaging, as shown in Fig. 2[link]. These calculations are for 2D imaging of copper features in silicon (a) to represent an integrated circuit and for imaging protein features adjacent to ice with over- and underlying layers (Fig. 1[link]) of 70% water/30% ice as tissue (b) to represent a biological specimen. These figures show contour lines for log10(x), so that x = 7 refers to a contour of D = 107; the underlaid grayscale image also displays x. Also shown as a white line is the 1/e attenuation length μ−1(E) of the background material (either silicon or tissue) as a function of photon energy [equation (4)[link]].

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 54| Part 2| April 2021| Pages 386-401
https://doi.org/10.1107/S1600576721000194
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