Laue X-ray diffraction studies of the structural perfection of Al-doped thermomigration channels in silicon

Lomov, A.A.; Punegov, V.I.; Seredin, B.M.

doi:10.1107/S1600576721001473

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 5
A schematic of the Laue diffraction in a silicon plate with a vertical Si(Al) channel. The width of the front of the beam on the detector window D is 120 µm. Inset: interplanar spacing in the matrix and in the channel.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 54| Part 2| April 2021| Pages 588-596

https://doi.org/10.1107/S1600576721001473

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