Figure 3
Overview of GID tomography. (a) GIWAXS patterns are collected while scanning in x and rotation angle ϕ and subsequently used to form (b) peak sinograms for each peak, e.g. (011), (020). (c) On the basis of the indexing of GIWAXS patterns, a series of azimuthal rotation angles are calculated, each corresponding to a peak. (d) The sinogram for domain dn is then formed from 1D projections
I(pm)dn, each at angle of the corresponding peak sinogram for peak pm. From the domain sinograms in (d), tomographic reconstruction methods can then be used to recover (e) the shape of each domain on (f) the entire thin film. |