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Figure 1
INRIM's combined X-ray and optical interferometer. The analyser displacement and the pitch and yaw angles are measured by laser interferometry and differential wavefront sensing. The transverse displacements (horizontal and vertical) are measured via capacitive sensors (not shown in the figure). The arrows indicate the positive directions of the axial and out-of-focus displacements.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 54| Part 5| October 2021| Pages 1403-1408
https://doi.org/10.1107/S1600576721007962
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