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Figure 4
(a) A 00012 back-reflection topograph showing the dislocation content of an RSM measurement position on wafer A1, area `D', revealing a regularly arranged BPD network that is homogeneously distributed. A zoomed-in section (1) verifies no appearance of TSDs. (b) The corresponding RSM recorded in 0004 reflection shows an expansion of the diffracted intensity distribution along q||, indicating crystal lattice tilt.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 56| Part 3| June 2023| Pages 776-786
https://doi.org/10.1107/S1600576723003291
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