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Figure 12
(a) Experimental (qy > 0) and simulated (qy < 0) 2D GISAXS patterns of the example film at an incident angle of 0.20° at step 3. Dashed white lines indicate the positions of linecuts I–V. The residual plot is shown in Fig. S8(c). (b)–(f) Linecuts I–V of experiment (open symbols) and simulation (solid lines: protrusions only; dashed lines: protrusions and aggregates). Green areas indicate the range of each linecut included in the fit.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 56| Part 5| October 2023| Pages 1330-1347
https://doi.org/10.1107/S1600576723006520
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