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Figure 4
Evolution of the PMMA layer parameters during spin coating. (a) PMMA thickness versus time. The plot demonstrates an initial fast decay followed by a period of stable thickness, indicating equilibrium between the centrifugal force and viscosity. Subsequently, on the time scale of tens of seconds, thinning occurs due to toluene evaporation. (b) PMMA roughness versus time. The graph illustrates an increase in roughness attributed to toluene evaporation. (c) PMMA SLD versus time. The plot displays a decrease in the film SLD as toluene evaporates from the porous PMMA layer. The time interval between measurement points is 33 ms and one XRR curve was obtained in 8.25 ms.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 2| April 2024| Pages 314-323
https://doi.org/10.1107/S1600576724001171
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