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Figure 5
(a) Thickness evolution of the PMMA layer at the short time scale fitted with an exponential decay function. (b) Fit of the qXRR data by NN for five representative qXRR curves during the PMMA thinning (5 g l−1 concentration and 30.3 Hz rotation).

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 2| April 2024| Pages 314-323
https://doi.org/10.1107/S1600576724001171
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