X-Ray Calc 3: improved software for simulation and inverse problem solving for X-ray reflectivity

Penkov, O.V.; Li, M.; Mikki, S.; Devizenko, A.; Kopylets, I.

doi:10.1107/S1600576724001031

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 1
Examples of different types of fitting structures. (a) Regular structure. (b) Periodic structure. (c) Periodic structure with distributions: the thicknesses of the Mo and Si layers are varied across the stack; the rest of the parameters are paired.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 57| Part 2| April 2024| Pages 555-566

https://doi.org/10.1107/S1600576724001031

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