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Figure 3
(a) A comparison between the measured and calculated spectra. (b) The probing depth in silicon based on the geometry (see Fig. 1) plotted as a function of energy.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 3| June 2024| Pages 734-740
https://doi.org/10.1107/S1600576724003509
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