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Figure 4
Defects in a (001) Si cross-section sample (sample Si-1). (a) A Lang topography image (004 reflection, Mo Kα1 radiation). Adapted with permission from Dadzis et al. (2020BB3) under a Creative Commons Attribution 4.0 International License, https://creativecommons.org/licenses/by/4.0/. (b)–(d) Maps of the diffracted intensity measured in the µ-XRF system for the selected maxima of the 224, 337 and 448 reflections, respectively. Increased brightness indicates an increase in the integrated intensity for the energy range corresponding to the indicated reflections.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 3| June 2024| Pages 734-740
https://doi.org/10.1107/S1600576724003509
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