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Figure 2
Near-field energy density penetration inside the model nanograting (as shown in Fig. 1[link]) calculated at different configurations of the incident beam. (a) Incidence angle is critical and azimuthal angle is less than critical – the field does not penetrate deep inside the sample structure. (b) Incidence and azimuthal angles are critical – the field penetrates the sample even if the incident angle is relatively small. (c) Incident angle is higher than critical (at the position of crossing of −1st- and 1st-order diffraction lines) and beam is parallel to the grating lines – the field penetrates the sample. (d) Incident beam angle is higher than critical and beam is far from parallel to the grating – the field looks uniform in the in-plane direction, so the structured layer can be treated as a thin-film layer of average density.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 5| October 2024| Pages 1288-1298
https://doi.org/10.1107/S1600576724007179
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