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Figure 6
Final reconstructed profile of the nanograting based on the best fit of X-ray data in comparison with TEM images. Most of the features besides overetch are matched.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 57| Part 5| October 2024| Pages 1288-1298
https://doi.org/10.1107/S1600576724007179
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