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Figure 5
SEM stage calibration through the SA-ECP indexing method by measuring the indexed stage position versus the applied position for (a) tilt about the X and Y axes, and (b) rotation about the Z axis. Note that our stage follows an opposite convention in the Y direction i.e. TiltY = −dRy. (c) The stage uncertainty was quantified by an RMSE of 0.07° and 0.1° in tilt and rotation, respectively, with standardized residuals and 95% confidence bounds (±1.96 SD) confirming consistent alignment without significant outliers.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 59| Part 2| April 2026| Pages 530-551
https://doi.org/10.1107/S1600576726000567
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