Probing local atomic structure in thin films by grazing-incidence total X-ray scattering with a convergent X-ray beam

Yoshimoto, M.; Ito, K.; Omote, K.

doi:10.1107/S1600576726007181

Figure 3
Comparison of X-ray reflectivity profiles for the ITO thin film (top) and corresponding deviation curve (bottom). The red solid line shows the observed intensity. Blue filled circles show the calculated profile obtained using the refined ITO thin film parameters. The reliability factor R = $[(\sum _i | \log _{10}I_{{\rm{obs}},\,i} - \log _{10}I_{{\rm{calc}},\,i} |) / [\sum _i | {1 \over 2}(\log _{10}I_{{\rm{obs}},\,i} + \log _{10}I_{{\rm{calc}},\,i} ) | ]]$ is 0.74% after refinement.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 59| Part 5| October 2026|

https://doi.org/10.1107/S1600576726007181

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