Probing local atomic structure in thin films by grazing-incidence total X-ray scattering with a convergent X-ray beam

Yoshimoto, M.; Ito, K.; Omote, K.

doi:10.1107/S1600576726007181

Figure 4
Comparison of absorption correction results: (top) absorption correction for a convergent beam using equations (5) and (6); (bottom) absorption correction for a parallel beam using equation (3)

. The penetration depth of the ITO thin film was calculated from the thin film parameters obtained by XRR analysis.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 59| Part 5| October 2026|

https://doi.org/10.1107/S1600576726007181

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