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Figure 10
Diffraction line broadening measured for fcc-(Ti,Al)N in Ti0.53Al0.47N and plotted as a function of [\sin\theta]. Diffraction indices are indicated at the bottom of the figure. The line broadening in the sample deposited at UB = −40 V (circles) was approximated by equation (8)[link]. The same approximation was used for the line broadening measured at low diffraction angles in the samples deposited at UB = −80 (boxes) and −120 V (triangles). The line broadening measured in these samples at high diffraction angles was assumed to be constant.

Volume 1| Part 6| October 2014| Pages 446-456
ISSN: 2052-2525