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Figure 7
Dependence of the residual stress on the bias voltage for samples with chemical compositions Ti0.53Al0.47N (open symbols) and Ti0.44Al0.56N (filled symbols). The residual stress was calculated using the Reuss approach with the elastic constants from Tasnádi et al. (2010BB40).

Volume 1| Part 6| October 2014| Pages 446-456
ISSN: 2052-2525