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Figure 3
Examples of form factor calculations using HipGISAXS. (a) An SEM image of a line grating with complex side walls, (c) a generated discrete shape model using triangulation and (e) the calculated form factor. (b) The characteristic building of the Berkeley laboratory, (d) a simplified and miniaturized shape model and (f) the calculated form factor. The q range of each form factor will depend on the size of the modeled object and the degree of scattering contrast.

Volume 2| Part 1| January 2015| Pages 106-125
ISSN: 2052-2525