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Figure 2
(a) Geometry of Cu-TSVs along with the incident X-ray microbeam and the X-rays diffracted from the Cu. (b) Microstructure of typical Cu-TSVs acquired using scanning electron microscopy of cross sections cut using focused ion beams.

IUCrJ
Volume 2| Part 6| September 2015| Pages 635-642
ISSN: 2052-2525
doi:10.1107/S2052252515015031