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Figure 2
Changes in the GISAXS pattern by line length. (a) GISAXS pattern of the 2500 µm-long grating, showing diffraction orders on a circle. (b) Detailed view of the first diffraction order of gratings with differing lengths, showing the elongation of the first diffraction order with decreasing grating length (top) and corresponding grating lengths (bottom). (c) GISAXS pattern of the 4 µm-long grating, showing the elongated diffraction orders. For comparability, all measurements were taken with the same exposure time, which leads to overexposure for the 2500 µm-long grating.

IUCrJ
Volume 4| Part 4| July 2017| Pages 431-438
ISSN: 2052-2525
https://doi.org/10.1107/S2052252517006297