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Figure 3
Reciprocal-space construction of GISAXS from gratings. (a) Ewald sphere (grey mesh) and grating truncation rods (orange), which are the reciprocal-space representation of an infinite grating. The projection of the intersection (red) on the detector (not shown) leads to the GISAXS pattern. (b) For a short (i.e. finitely long) grating, the reciprocal-space representation (orange) along kx is no longer a delta function. Instead, it is , leading to grating truncation sheets. The intersection of the grating truncation sheets and the Ewald sphere leads to elongated diffraction orders. |
ISSN: 2052-2525
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, leading to grating truncation sheets. The intersection of the grating truncation sheets and the Ewald sphere leads to elongated diffraction orders.


