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Figure 4
Description of scattering of short gratings as single-slit diffraction. (a) Comparison between the measured FWHM extracted from the GISAXS patterns for the length series and the FWHM calculated from the line length l according to equation (7)[link]. The marked red dots correspond to line lengths shown in detail in (b) and (c). (b, c) Cut along the first diffraction order of the scattering of the grating target with l = 45.3 µm (b) and l = 6 µm (c). What is shown is the FWHM extracted from the measured data and the intensity profile calculated for slit diffraction according to equation (6)[link]. The inset in (b) shows the intensity in logarithmic units.

IUCrJ
Volume 4| Part 4| July 2017| Pages 431-438
ISSN: 2052-2525
https://doi.org/10.1107/S2052252517006297