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Figure 5
Top-view SEM image of surrounded field 1, showing the corner of the small grating field (top right) and the surroundings. Darker areas correspond to etched grooves, lighter areas to mesas. The orientations of the small grating field and the surroundings, at 10° rotation, are in red.

IUCrJ
Volume 4| Part 4| July 2017| Pages 431-438
ISSN: 2052-2525
https://doi.org/10.1107/S2052252517006297