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Figure 1
Experimental setup. The amplifier (ring structure) is placed upstream of the sample of interest. The X-ray beam is denoted by the large purple cylinder; the inner cylinder denotes the approximate transverse coherence length (the longitudinal coherence length is large). When the sample and amplifier are within the same coherence volume, the scattering pattern (lower left) exhibits fringes (circled in green) whose spacing and direction are related to the transverse separation between the two scattering entities (green arrow). The lower-right figure shows an SEM image of a validation structure, where the sample and amplifier were patterned on a single substrate.

Volume 4| Part 5| September 2017| Pages 604-613
ISSN: 2052-2525