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accessGrazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum
aPhysikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, Germany, and bHelmholtz-Zentrum Berlin (HZB), Albert-Einstein-Straße 15, 12489 Berlin, Germany
*Correspondence e-mail: mika.pflueger@ptb.de
An error in the paper by Pflüger, Soltwisch, Probst, Scholze & Krumrey [IUCrJ (2017), 431–438] is corrected.
Keywords: grazing-incidence small-angle X-ray scattering; GISAXS; beam footprint; lithographic inspection; gratings.
![[Pflüger, M., Soltwisch, V., Probst, J., Scholze, F. & Krumrey, M. (2017). IUCrJ, 4, 431-438.]](../../../../../../logos/arrows/iucrj_arr.gif "Pflüger, M., Soltwisch, V., Probst, J., Scholze, F. & Krumrey, M. (2017). IUCrJ, 4, 431-438.")
![[\theta_{\rm{f}} = \arctan \left( {{ \cos\varphi\,n\lambda }\over{ \sin\varphi\, n\lambda+p\cos\alpha_{\rm{i}} }} \right) . \eqno (5)]](teximages/hf5934fd1.gif)
References
Pflüger, M., Soltwisch, V., Probst, J., Scholze, F. & Krumrey, M. (2017). IUCrJ, 4, 431–438. Web of Science CrossRef PubMed IUCr Journals Google Scholar
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